跟读练习: How are Microchips Made? 🖥️🛠️ CPU Manufacturing Process Steps - 通过视频学习英语口语
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Inside the smartphone are 62 microchips containing a total of 90 billion transistors.
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These microchips are incredibly powerful and the cornerstone of all technology.
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But how are billions of nanoscopic transistors manufactured into a microchip the size of a tiny ant?
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Well, all these microchips were manufactured in a semiconductor fabrication plant like this one.
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Inside it is a clean room which spans the area of eight football fields and is filled with hundreds of machines
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ranging in size from that of a van to
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that of a city bus and costing anywhere between a few million and 170 million dollars.
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Within this microchip factory silicon wafers travel from machine to machine and and undergo around a thousand processes over a three-month period.
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And, by the end of production, each silicon wafer will be covered in hundreds of CPU chips,
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each containing 26 billion transistors.
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When we zoom in, we can see the nanoscopic transistors at the bottom, and over a dozen layers of wires above.
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This integrated circuit is then cut out from the wafer, tested and packaged so that it can be installed into your desktop computer.
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In this video, we're going to explore the entire microchip manufacturing process
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and show you how billions of nanoscopic transistors
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and an impossibly complex 3D maze of wires are manufactured in one of the world's most technologically advanced microchip factories.
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It's an incredibly complicated process, So stick around and let's jump right in.
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A portion of this video is sponsored by Brilliant.org.
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There are two sides to understanding how microchip manufacturing works.
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The first is the sequence of steps and processes needed to build the nanoscopic transistors and the labyrinth of wires.
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Whereas the second is how the semiconductor fab and multi-million dollar equipment of the clean room floor work.
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And we'll be flipping between these two sides to get a complete picture.
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Let's start by opening up this desktop computer, focusing on the CPU and taking a look at what's inside.
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Here we have an integrated circuit, or die, which we'll refer to as a chip.
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This chip has 24 cores, a memory controller, a graphics processor and many other sections.
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Within one of the cores we can see its block diagram and the various elements.
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Zooming in on this multiply block, we find a layout of 44,000 transistors that physically execute 32-bit multiplication
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and constitute just .00017% of the overall 26 billion transistors in the CPU.
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Zooming in even further, we see layers of metal wires or interconnects, and at the very bottom are the transistors that form the basic logic gates.
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Note that these layers of metal interconnects aren't floating, but rather the empty space that you see is filled with insulating materials,
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thus providing structure and preventing the metal wire layers from touching.
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Furthermore, here we're only showing the transistors at the bottom and five layers of metal interconnects, with vias traveling vertically between the layers.
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In actuality, there are a total of 17 metal layers of wires in the CPU,
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and each successive set of levels uses larger and larger interconnects.
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At the bottom are local interconnects that move data around this 32-bit multiply circuit.
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In the middle are intermediate interconnects that move data around the core.
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And at the top are global interconnects that move data around the entire CPU.
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You might be wondering how small are these transistors.
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Zooming in again and past the interconnect layers,
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we find finfets, which are transistors whose channel dimensions are 36 by 6 by 52 nanometers,
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with a transistor-to-transistor pitch of 57 nanometers.
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Clearly the transistors are incredibly small.
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Here's a mitochondria, a dust particle, and a human hair for size comparisons.
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Now that you have a sense of what the transistors and labyrinth of metal interconnects look like, let's explore how they're manufactured.
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We'll begin with an analogy.
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Imagine baking a cake that's 80 layers tall, with each layer cut to a unique shape.
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To make this cake, there are 940 steps in the recipe,
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which takes three months to complete and and includes hundreds of exotic ingredients.
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And if any measurement, baking time, or temperature is more than 1% off, then the cake is entirely ruined.
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That's kind of what it's like to make a microchip.
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But microchips are even more complicated.
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Let's look at a single layer of this integrated circuit and run through a simplified set of steps used to build it.
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To start, a layer of insulating silicon dioxide is deposited on top of the wafer,
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and then a layer of light-sensitive photoresist is spread across the top.
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Next, using UV light and a stencil, a pattern is applied to the photoresist.
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Solvents then are used to remove the areas hit by the UV light, thus creating a patterned mask layer.
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Using the mask, the revealed silicon dioxide is etched away down to the previous layer.
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Next, the mask layer is removed
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and a layer of copper is added to cover the wafer and fill in the areas that were just etched away.
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Finally, the surface is ground down and leveled off to reveal the copper and insulator patterns.
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And thus, a single layer is completed.
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In order to build the next layer, which is a vertical set of metal vias, we repeat the same set of steps,
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but use a different pattern for the photomask.
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Since these layers are all built using the same set of steps,
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it's more effective to visualize the steps as a circle like a clock.
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To build all the 80 layers of the die,
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this sequence is repeated over and over, resulting in 940 steps.
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One important note is
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that the FinFET transistors at the bottom are even more complicated than the metal wires
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and thus additional steps are needed to fabricate them.
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Furthermore, cleaning the wafer to wash away dust particles that may have landed on the wafer,
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as well as inspecting the wafer to make sure everything is being built properly, happens frequently and these steps need to be added to the circle.
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A different tool is used to complete each of these process steps.
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Now that we have an understanding of the steps, let's take a look at this semiconductor fabrication plant.
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This CPU is manufactured on a 300 millimeter silicon wafer which can fit 230 CPU chips.
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In contrast, DRAM chips are considerably smaller and thus 952 of them can fit on a wafer.
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These silicon wafers are carried in stacks of 25 using a container called a front opening universal pod or foop.
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This sealed plastic wafer carrier is transported around the clean room floor using an overhead transport system
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which lowers the foop onto the tool's landing pad.
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Inside the tool, robotic arms transport the wafer through vacuum load locks and to different process chambers where materials are added,
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removed, or processed in ways that we'll explore later.
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The wafers are then returned to the foop, resealed inside, lifted up to the overhead transport system,
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and carried to and dropped onto the next tool, where the next step in the process is completed.
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To build the entire chip composed of 80 different layers, it takes three months of traveling from tool to tool,
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where at each stop one of the 940 process steps is completed.
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In order to increase the microchip mass production capabilities of a semiconductor fabrication plant,
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or fab, typically there are dozens of the same semiconductor tools tools organized in rows that perform the same process.
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On the clean room floor, there are a total of 435 semiconductor tools,
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resulting in the fab's production capacity of 50,000 wafers, or 11.5 million CPUs a month.
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These tools have rather complicated names, so we'll start by categorizing them according to their functionality.
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There are six groups, making the mask layer, adding material, removing material, modifying the material,
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cleaning the wafer, and finally inspecting the wafer.
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We've color-coded the different functional groups to the various tools and process steps to help you not get lost.
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Let's next look at each of these semiconductor tools and see how they process the wafer in various ways.
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We'll start with the ones that are used to make the mask layer or the nanoscopic stencil on the wafer.
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These tools include the PhotoResist Spin Coater, PhotoLithography Tool, Developer, and PhotoResist Stripper.
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First, the PhotoResist Spin Coater applies a light sensitive layer to the surface of the wafer
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and sends it through a soft bake where the wafer is heated in order to evaporate the solvent from the photoresist.
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Next, the wafer goes to the lithography tool, which shines UV light through a stencil, which is technically called a photomask.
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The light passes through the stencil and is then demagnified or shrunk down to produce a nanoscopic pattern on the wafer.
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Wherever the light from the stencil touches the wafer, the photoresist is weakened.
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The wafer then goes to the developer and the weakened photoresist is washed away,
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leaving only the patterned nanoscopic stencil on the wafer.
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The wafer is then sent through a hard bake to harden the remaining photoresist.
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Next, the wafer travels to other tools to undergo processing.
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And once these processes are completed, the wafer goes to a photoresist stripper,
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which uses solvents to dissolve and remove the photoresist mask layer.
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And that's how a mask layer is formed and then removed.
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The photolithography tool is one of the most important, so let's take a look at it.
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Inside is a UV light source, a set of lenses to focus the light,
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a photomask which contains the stencil or design of the layer to be patterned, and a wafer carrier.
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The photomask is 6 by 6 inches and, based on the dimensions of the CPU,
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can fit two copies of a single layer of the CPU design.
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The purpose of using a photomask with these crazy optics is
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because it's a reliable way to copy
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and paste a design for billions of nanoscopic transistors and wires onto 230 identical CPUs
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on a single wafer in a few minutes.
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After the light passes through the photo mask,
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the UV light goes to more lenses in order to shrink down the pattern by a factor of four
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and print a single layer of the design onto the photoresist.
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The wafer carrier steps from position to position,
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printing the photo mask image at each stop until all 230 chips are patterned.
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Let's clarify one detail.
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In our previous examples we talked a lot about this CPU having 80 layers.
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Specifically, what we were referring to is the number of photo masks
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and mask layers used to create all the different layers of patterns on the wafer.
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Therefore, one complete CPU chip uses 80 different photo masks, each costing $300,000.
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With only one mask layer being patterned at a time, this CPU chip will undergo 80 separate visits to the lithography tool.
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We could spend another hour talking about photolithography, but let's move on to the next category of tools.
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Deposition tools are used to add or deposit material onto the wafer.
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A lot of times we use the mask layer from the
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photolithography step to add materials to the areas uncovered by the mask layer, kind of like spray painting through a stencil.
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Due to the wide range of elements and compounds used to create the layers,
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deposition tools have a wide range of variations with complicated names and acronyms for each variant.
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But essentially, there are three key groups of materials that are added or deposited onto the wafer.
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Metals such as copper or tantalum, insulators which are typically called oxides, and crystalline layers of silicon.
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Each group of different materials uses different physics and chemistry principles to deposit the material on the wafer,
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and therefore has a different technical name for the tool that deposits the material.
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Deposition tools typically have a central wafer handling chamber, with the various chambers attached to the edges,
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each one dedicated to adding just a single element or compound.
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The next category of machines do the opposite, which is to remove material.
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There are two key methods.
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The first is etching.
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Etchers use either corrosive chemicals or high-energy plasmas to react with and remove materials from the surface of the wafer.
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They're typically used with the mask layer stencil in order to remove the material exposed by the mask,
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thus creating a hole that can be later filled by a deposition tool.
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The second method to remove material is CMP, which is chemical mechanical planarization.
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CMP applies slurry and uses abrasive pads to grind and polish away the top surface of the wafer, making it perfectly flat.
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CMP levels off the top layers of the wafer
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and is typically used as the last step in a cycle
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of processes in order to prepare the wafer for another layer to be added.
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The fourth category are tools that modify the silicon and are called ion implanters.
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These tools use the photomask stencil to bombard the unmasked regions with phosphor,
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boron, or other elements in order to make the P and the N regions required to form the transistors themselves.
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Therefore, ion implanters are only used in the front end of line.
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You might think that this is adding material.
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However, ion implanters only add around one atom of phosphor or boron for every 10,000 atoms of silicon.
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Additionally, while other machines spray paint a layer on top of the wafer, ion implanters hurl atoms deep into the silicon lattice,
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kind of like a cannon launching a baseball six feet into a concrete wall.
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This process typically damages the silicon lattice,
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which is why the following step is to repair the silicon by heating the wafer using a separate tool called an annealer.
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The fifth category of tools are used to clean and remove any contaminants or particles from the wafer.
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These wafer washers use ultra-pure water to clean the wafer and then dry it with nitrogen or hot isopropyl alcohol.
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Cleaning the wafer happens rather frequently in order to remove any stray particles that may have fallen onto the wafer.
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And finally, sixth, are tools that inspect the transistors and metal layers for defects and are called metrology tools.
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A common metrology tool uses a scanning electron microscope with nanometer
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level resolution to take pictures of the top surface of the wafer
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and determine if there are defects such as improperly patterned layers or particles on the surface.
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When fabricating an integrated circuit that takes three months to complete,
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it's important to repeatedly monitor the progress and make sure that each of the processes is being executed with nanometer level precision.
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Now that we've covered each of the categories, here are the color-coded process steps along with the layout of the tools the semiconductor fabrication plant.
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Let's run through the complete set of steps used to manufacture a single metal interconnect layer.
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First, a layer of insulating silicon dioxide is deposited onto the wafer.
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Next, photoresist is spread across the surface and the wafer is sent through a soft bake to remove the solvent.
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The wafer then travels to the photolithography tool, where the design from the photomask is transferred to each of
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the chips on the wafer by weakening the areas of photoresist hit by the light.
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The wafer next goes to the developer to wash away the sections
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that were hit by the light from the lithography tool and then through a hard bake to harden the remaining photoresist.
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With the mask layer built, the wafer goes to an etching tool,
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where a plasma etcher removes a vertical column through the exposed silicon dioxide until it reaches the previous layer's metal liars.
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Next, the wafer is sent to a photoresist stripper, where the mask layer is removed.
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The wafer then travels to a physical vapor deposition tool,
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where a sequence of metals fills in the exposed pattern and coats the wafer in metal.
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Finally, the wafer is sent to a chemical mechanical planarization tool, where the metal is ground down
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so that all that remains is a flat layer of insulating silicon dioxide
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and conductive copper interconnects that match the pattern from the photomask.
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A single metal layer is now completed, and the wafer is ready for the next cycle to begin,
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where insulating silicon dioxide in the vias will be added.
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Note that cleaning and wafer metrology or inspection steps occur in between many of these other steps.
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Furthermore, the process steps to make the transistors are less straightforward and utilize the ion implanter,
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and thus we'll cover them in a separate video on transistor physics and design.
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These steps are for building the integrated circuit on the wafer.
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However, there are additional steps in manufacturing a microchip, which we'll explore in a little bit.
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But before we get there, one important thing to note
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is that the semiconductor industry is incredibly secretive regarding the exact tool layout
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and the process steps and recipes used to make the transistors.
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We wanted to make the best video on how microchips are made,
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and it took us 180 hours of scouring the internet and textbooks for information and reference images.
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And, using what we found, we spent 205 hours modeling each of these tools,
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the many layers of the integrated circuit, and the semiconductor fab.
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Furthermore, writing the script took about 100 hours,
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and then animating all these visuals took more than 825 hours.
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As a result, this video took over 1300 hours to make, and it's entirely free to watch.
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We want to make more videos like this one, where we explore computer architecture and how transistors work,
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The best way you can help is by taking a few seconds to scroll down Write a comment below,
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like this video, subscribe if you haven't already, and then share this video on social media or send it to a friend or colleague.
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Truly, just a few seconds of your time helps far more than you think.
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Additionally, we have a Patreon page where we'll be releasing behind-the-scenes footage of our work and updates for upcoming videos.
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If you find what we do useful, we would appreciate any support.
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Thank you.
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So then, what are the additional steps in manufacturing a microchip?
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Before chip manufacturing at the fab, we first have to manufacture the silicon wafers by refining quartzite into pure silicon,
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and then growing a monocrystalline ingot and cutting it into wafers.
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For reference, these 300 millimeter wafers are around three quarters of a millimeter thick.
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They have a barcode on the side and a small notch in them to indicate the direction of the crystal lattice.
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Furthermore, these wafers are incredibly delicate and shatter into hundreds of shards when broken.
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A single wafer costs around $100.
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But after being populated with CPUs,
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it's worth closer to $100,000, making it quite literally 10 times more valuable than its weight in gold.
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Moving on to the steps after chip manufacturing.
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The completed wafer is sent to a separate building where each of the CPUs undergoes rigorous testing to figure out
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if it works as intended.
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If a CPU works, that's great.
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But frequently, a particle or photomass defect has damaged a section of the integrated circuit, rendering that section defective.
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These semi-functional circuits are then categorized or binned, based on what still works.
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These Intel 13th Gen processors are sold as an i9, i7, i5, or i3,
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depending on how many cores are functional with different product lines of CPUs whose onboard integrated graphics sections are defective.
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These wafers are transported to another building where the chips are cut out using a laser, flipped over and placed on an interposer,
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which distributes the connection points to a printed circuit board while a protective heat conductive cover is placed on the back side.
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The printed circuit board holds the landing grid array that interfaces with the motherboard as well as various electrical components.
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Next, an integrated heat spreader is mounted on top
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and the entire assembly is tested one last time before being packaged for sale.
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Finally, the CPU is now ready to be mounted onto the motherboard and installed into your desktop computer.
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It's important to understand that chip manufacturing requires an incredible amount of science
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and engineering and there's a free
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and easy way to learn the basic principles inside each of these complex tools and that's with this video's sponsor Brilliant.org.
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Microchip fabrication is a massive topic.
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And thus, we have two more equally complex videos that we're working on.
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The first will be an in-depth 3D animated factory tour and the second will explore transistor physics,
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FinFETs, and the next generation of transistors.
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